Semiconductor device structure and method for forming the same

ABSTRACT

A semiconductor device structure is provided, in some embodiments. The semiconductor device structure includes a semiconductor substrate having a first surface, a second surface, and sidewalls defining a recess that passes through the semiconductor substrate. The semiconductor device structure further includes an interconnect structure having one or more interconnect layers within a first dielectric structure that is disposed along the second surface. A conductive bonding structure is disposed within the recess and includes nickel. The conductive bonding structure has opposing outermost sidewalls that contact sidewalls of the interconnect structure.

REFERENCE TO RELATED APPLICATIONS

This Application is a Continuation of U.S. application Ser. No.15/880,684, filed on Jan. 26, 2018, which is a Continuation of U.S.application Ser. No. 14/933,619, filed on Nov. 5, 2015 (now U.S. Pat.No. 9,881,884, issued on Jan. 30, 2018), which claims the benefit ofU.S. Provisional Application No. 62/205,526, filed on Aug. 14, 2015. Thecontents of the above-referenced Patent Applications are herebyincorporated by reference in their entirety.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experienced rapidgrowth. Technological advances in IC materials and design have producedgenerations of ICs. Each generation has smaller and more complexcircuits than the previous generation. However, these advances haveincreased the complexity of processing and manufacturing ICs.

In the course of IC evolution, functional density (i.e., the number ofinterconnected devices per chip area) has generally increased whilegeometric size (i.e., the smallest component (or line) that can becreated using a fabrication process) has decreased. This scaling-downprocess generally provides benefits by increasing production efficiencyand lowering associated costs.

However, since feature sizes continue to decrease, fabrication processescontinue to become more difficult to perform. Therefore, it is achallenge to form reliable semiconductor devices at smaller and smallersizes.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1L are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments.

FIG. 1L-1 is a top view of the bonding pad, the nickel layer, and thegold layer of FIG. 1L, in accordance with some embodiments.

FIG. 1L-2 is a top view of the bonding pad, the nickel layer, and thegold layer of FIG. 1L, in accordance with some embodiments.

FIG. 1L-3 is a top view of the bonding pad, the nickel layer, and thegold layer of FIG. 1L, in accordance with some embodiments.

FIG. 2 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments.

FIG. 3 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments.

FIG. 4 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments.

FIGS. 5A-5B are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments.

FIG. 6 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments.

FIG. 7 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments.

FIG. 8 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments.

FIGS. 9 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 10 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 11 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 12 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIGS. 13 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 14 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 15 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 16 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 17 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 18A is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 18B is a top view of a nickel layer, a conductive ring structure,and a portion of a wiring layer of the semiconductor device structure ofFIG. 18A, in accordance with some embodiments.

FIG. 19 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

FIG. 20 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the subject matterprovided. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly. It should be understoodthat additional operations can be provided before, during, and after themethod, and some of the operations described can be replaced oreliminated for other embodiments of the method.

FIGS. 1A-1L are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments.

As shown in FIG. 1A, a semiconductor substrate 110 is provided, inaccordance with some embodiments. The semiconductor substrate 110 hassurfaces 112 and 114 opposite to each other, in accordance with someembodiments. The semiconductor substrate 110 is a semiconductor wafer(such as a silicon wafer) or a portion of a semiconductor wafer, inaccordance with some embodiments.

In some embodiments, the semiconductor substrate 110 is made of anelementary semiconductor material including silicon or germanium in asingle crystal, polycrystal, or amorphous structure. In some otherembodiments, the semiconductor substrate 110 is made of a compoundsemiconductor such as silicon carbide, gallium arsenide, galliumphosphide, indium phosphide, indium arsenide, an alloy semiconductorsuch as SiGe, or GaAsP, or a combination thereof. The semiconductorsubstrate 110 may also include multi-layer semiconductors, semiconductoron insulator (SOI) (such as silicon on insulator or germanium oninsulator), or a combination thereof.

As shown in FIG. 1A, the surface 114 has a recess 114 a, in accordancewith some embodiments. As shown in FIG. 1A, an insulating layer 10 isformed in the recess 114 a, in accordance with some embodiments. Theinsulating layer 10 is filled in the recess 114 a, in accordance withsome embodiments.

The insulating layer 10 is made of any suitable insulating material,such as hydrogenated silicon oxycarbide (SiCO:H), silicon oxynitride,silicon oxide, borosilicate glass (BSG), phosphoric silicate glass(PSG), borophosphosilicate glass (BPSG), fluorinated silicate glass(FSG), low-k material, porous dielectric material, or a combinationthereof, in accordance with some embodiments.

As shown in FIG. 1A, a dielectric layer 120 is deposited over thesurface 114 and the insulating layer 10, in accordance with someembodiments. The dielectric layer 120 is a multi-layer structure, inaccordance with some embodiments. The dielectric layer 120 includesdielectric layers stacked with each other(not shown), in accordance withsome embodiments.

The dielectric layer 120 is made of any suitable dielectric material,such as hydrogenated silicon oxycarbide (SiCO:H), silicon oxynitride,silicon oxide, borosilicate glass (BSG), phosphoric silicate glass(PSG), borophosphosilicate glass (BPSG), fluorinated silicate glass(FSG), low-k material, porous dielectric material, or a combinationthereof, in accordance with some embodiments. The dielectric layer 120is deposited by any suitable process, such as a CVD process, HDPCVDprocess, spin-on process, sputtering process, or a combination thereof,in accordance with some embodiments.

As shown in FIG. 1A, wiring layers 132 and 134 are formed in thedielectric layer 120, in accordance with some embodiments. In someembodiments, a wiring layer 136 is embedded in the dielectric layer 120.The wiring layer 136 is exposed by the dielectric layer 120, inaccordance with some embodiments. The wiring layers 132, 134, and 136are made of any suitable conductive material, such as copper, a copperalloy, silver, gold, aluminum, or a combination thereof.

As shown in FIG. 1A, conductive via structures 142 and 144 are formed inthe dielectric layer 120, in accordance with some embodiments. Theconductive via structures 142 electrically connect the wiring layer 132to the wiring layer 134, in accordance with some embodiments. Theconductive via structures 144 electrically connect the wiring layer 134to the wiring layer 136, in accordance with some embodiments.

As shown in FIG. 1B, the semiconductor substrate 110 is flipped upsidedown, in accordance with some embodiments. As shown in FIG. 1B, asemiconductor substrate 250 is provided, in accordance with someembodiments. The semiconductor substrate 250 is a semiconductor wafer(such as a silicon wafer) or a portion of a semiconductor wafer, inaccordance with some embodiments. In some embodiments, the semiconductorsubstrate 250 is made of an elementary semiconductor material includingsilicon or germanium in a single crystal, polycrystal, or amorphousstructure.

In some other embodiments, the semiconductor substrate 250 is made of acompound semiconductor such as silicon carbide, gallium arsenide,gallium phosphide, indium phosphide, indium arsenide, an alloysemiconductor such as SiGe, or GaAsP, or a combination thereof. Thesemiconductor substrate 250 may also include multi-layer semiconductors,semiconductor on insulator (SOI) (such as silicon on insulator orgermanium on insulator), or a combination thereof.

As shown in FIG. 1B, a dielectric layer 260 is deposited over thesemiconductor substrate 250, in accordance with some embodiments. Thedielectric layer 260 is a multi-layer structure, in accordance with someembodiments. The dielectric layer 260 includes dielectric layers stackedwith each other (not shown), in accordance with some embodiments.

The dielectric layer 260 is made of any suitable dielectric material,such as hydrogenated silicon oxycarbide (SiCO:H), silicon oxynitride,silicon oxide, borosilicate glass (BSG), phosphoric silicate glass(PSG), borophosphosilicate glass (BPSG), fluorinated silicate glass(FSG), low-k material, porous dielectric material, or a combinationthereof, in accordance with some embodiments. The dielectric layer 260is deposited by any suitable process, such as a CVD process, HDPCVDprocess, spin-on process, sputtering process, or a combination thereof,in accordance with some embodiments.

As shown in FIG. 1B, wiring layers 272, 274, and 276 are formed in thedielectric layer 260, in accordance with some embodiments. In someembodiments, a wiring layer 278 is embedded in the dielectric layer 260.The wiring layer 278 is exposed by the dielectric layer 260, inaccordance with some embodiments. The wiring layers 272, 274, 276, and278 are made of any suitable conductive material, such as copper, acopper alloy, silver, gold, aluminum, or a combination thereof.

As shown in FIG. 1B, conductive via structures 282, 284, and 286 areformed in the dielectric layer 260, in accordance with some embodiments.The conductive via structures 282 electrically connect the wiring layer272 to the wiring layer 274, in accordance with some embodiments. Theconductive via structures 284 electrically connect the wiring layer 274to the wiring layer 276, in accordance with some embodiments.

The conductive via structures 286 electrically connect the wiring layer276 to the wiring layer 278, in accordance with some embodiments. Thesemiconductor substrate 250, the dielectric layer 260, the wiring layers272, 274, 276, and 278, and the conductive via structures 282, 284, and286 together form a wiring substrate S, in accordance with someembodiments.

As shown in FIG. 1B, the dielectric layers 260 and 120 are bonded witheach other, in accordance with some embodiments. The wiring layers 278and 136 are bonded with each other, in accordance with some embodiments.The wiring layers 278 and 136 are electrically connected with eachother, in accordance with some embodiments.

As shown in FIG. 1B, a dielectric layer 150 is formed over the surface112, in accordance with some embodiments. The dielectric layer 150 is atransparent layer, in accordance with some embodiments. The dielectriclayer 150 includes a high-k material, in accordance with someembodiments. The dielectric layer 150 includes oxide and/or nitride, inaccordance with some embodiments.

The dielectric layer 150 includes silicon oxide, silicon nitride, and/orsilicon oxynitride, in accordance with some embodiments. The dielectriclayer 150 is formed by any suitable process, such as a CVD process,HDPCVD process, spin-on process, sputtering process, or a combinationthereof, in accordance with some embodiments.

As shown in FIG. 1C, portions of the dielectric layer 150 and thesemiconductor substrate 110 are removed, in accordance with someembodiments. After the removal process, an opening 152 and a recess 116are formed, in accordance with some embodiments. The opening 152 passesthrough the dielectric layer 150, in accordance with some embodiments.

The recess 116 is formed in the semiconductor substrate 110 and recessedfrom the surface 112, in accordance with some embodiments. The recess116 passes through the semiconductor substrate 110, in accordance withsome embodiments. The recess 116 exposes a portion of the insulatinglayer 10, in accordance with some embodiments. In some embodiments, theremoval process includes a photolithography process and an etchingprocess.

As shown in FIG. 1C, an insulating layer 160 is formed over thedielectric layer 150 to cover the sidewalls 152 a of the opening 152 andthe sidewalls 116 a and the bottom surface 116 b of the recess 116, inaccordance with some embodiments. The insulating layer 160 is in directcontact with the insulating layer 10, in accordance with someembodiments. The insulating layer 160 includes oxide, such as siliconoxide, in accordance with some embodiments.

As shown in FIG. 1D, portions of the insulating layer 160, theinsulating layer 10, and the dielectric layer 120 are removed, inaccordance with some embodiments. After the removal process, openings162 and vias 10 a are formed, in accordance with some embodiments. Theopenings 162 pass through the insulating layer 160, in accordance withsome embodiments. The vias 10 a pass through the insulating layer 10 andpenetrate into the dielectric layer 120 to expose the wiring layer 132,in accordance with some embodiments. The removal process includes aphotolithography process and an etching process.

As shown in FIG. 1E, a bonding pad 180 is formed over the bottom surface116b of the recess 116 and extends into the vias 10 a to electricallyconnect to the wiring layer 132, in accordance with some embodiments.The bonding pad 180 includes a conductive material, in accordance withsome embodiments. The bonding pad 180 includes aluminum or copper, inaccordance with some embodiments. The bonding pad 180 is formed using aphysical vapor deposition process, a photolithography process, and anetching process, in accordance with some embodiments.

As shown in FIG. 1F, the insulating layer 160 over the top surface 154of the dielectric layer 150 is removed, in accordance with someembodiments. The insulating layer 160 in the recess 116 and the opening152 and exposed by the bonding pad 180 is thinned, in accordance withsome embodiments. The removal and the thinning of the insulating layer160 include an anisotropic etching process, in accordance with someembodiments. The anisotropic etching process includes a dry etchingprocess, in accordance with some embodiments.

As shown in FIG. 1G, a dielectric filling layer 190 is formed in therecess 116, the opening 152, and the vias 10 a,in accordance with someembodiments. The dielectric filling layer 190 is filled into the recess116, the opening 152, and the vias 10 a, in accordance with someembodiments. The formation of the dielectric filling layer 190 includesa deposition process and a chemical mechanical polishing process, inaccordance with some embodiments. The dielectric filling layer 190includes oxide (e.g., silicon oxide) or another suitable dielectricmaterial.

As shown in FIG. 1H, an opaque layer 210 is formed over the top surface154 of the dielectric layer 150, in accordance with some embodiments.The opaque layer 210 has light-blocking portions 212 and grid portions214, in accordance with some embodiments. The light-blocking portions212 are configured to block the light from reaching photosensitiveelements (e.g., photodiodes) over or in the semiconductor substrate 110,in accordance with some embodiments. The grid portions 214 areconfigured to guide the light towards photosensitive elements (e.g.,photodiodes) over or in the semiconductor substrate 110, in accordancewith some embodiments.

As shown in FIG. 1I, portions of the dielectric layer 150 between thegrid portions 214 or between the grid portion 214 and the light-blockingportion 212 are removed, in accordance with some embodiments. Theremoval process forms recesses 156 in the dielectric layer 150 andbetween the grid portions 214 or between the grid portion 214 and thelight-blocking portion 212, in accordance with some embodiments.

In some embodiments, a passivation layer (not shown) is formed over theopaque layer 210, the dielectric layer 150, the insulating layer 160,and the dielectric filling layer 190, in accordance with someembodiments. The passivation layer includes an insulating material, inaccordance with some embodiments.

As shown in FIG. 1J, a portion of the dielectric filling layer 190 isremoved, in accordance with some embodiments. The removal process formsan opening 192 in the dielectric filling layer 190, in accordance withsome embodiments. The opening 192 exposes the bonding pad 180 over thebottom surface 116 b (or the insulating layer 10), in accordance withsome embodiments.

As shown in FIG. 1K, a nickel layer 230 is formed over the bonding pad180, in accordance with some embodiments. The nickel layer 230 containsnickel as a major component, in accordance with some embodiments. Thenickel layer 230 contains at least 60 wt % of nickel, in accordance withsome embodiments. The nickel layer 230 contains at least 80 wt % ofnickel, in accordance with some embodiments. The nickel layer 230 is inthe opening 192, in accordance with some embodiments. The entire nickellayer 230 is in the opening 192, in accordance with some embodiments.The nickel layer 230 does not extend outside of the opening 192, inaccordance with some embodiments. The nickel layer 230 is asubstantially planar layer, in accordance with some embodiments.

The nickel layer 230 is formed using an electroless plating process, inaccordance with some embodiments. The electroless plating process isable to selectively deposit the nickel layer 230 on the metal layer(i.e., the bonding pad 180), in accordance with some embodiments.Therefore, the nickel layer 230 is formed without using aphotolithography process and an etching process, in accordance with someembodiments.

As shown in FIG. 1L, a gold layer 240 is formed over the nickel layer230, in accordance with some embodiments. The gold layer 240 containsgold as a major component, in accordance with some embodiments. The goldlayer 240 contains at least 60 wt % of gold, in accordance with someembodiments. The gold layer 240 contains at least 80 wt % of gold, inaccordance with some embodiments.

The gold layer 240 is formed using an immersion plating process, inaccordance with some embodiments. The gold layer 240 and the nickellayer 230 do not extend onto the surface 112, in accordance with someembodiments. The entire gold layer 240 and the entire nickel layer 230are in the opening 192, in accordance with some embodiments. Thethickness T1 of the nickel layer 230 is greater than the thickness T2 ofthe gold layer 240, in accordance with some embodiments.

The material of the bonding pad 180 is different from the material ofthe nickel layer 230 and the gold layer 240, in accordance with someembodiments. Since the Young's modulus of nickel is greater than that ofthe material of the bonding pad 180 (e.g., copper or aluminum), thenormal strain of nickel is less than that of the material of the bondingpad 180 (e.g., copper or aluminum) under the same normal stress.

Therefore, the formation of the nickel layer 230 prevents the bondingpad 180 from peeling off during a wire pull test or a ball shear testperformed subsequently. Since the hardness of gold is less than that ofnickel, the gold layer 240 buffers the bonding stress generated by awire bonding process or a ball bonding process performed subsequently.In this step, the semiconductor device structure 100 is substantiallyformed, in accordance with some embodiments.

In top view, the bonding pad 180 may have different shapes, and thenickel layer 230 and the gold layer 240 are formed over only the bondingpad 180 exposed by the opening 192. Examples of the bonding pad 180 withdifferent shapes are illustrated in FIGS. 1L-1, 1L-2, and 1L-3.

FIG. 1L-1 is a top view of the bonding pad 180, the nickel layer 230,and the gold layer 240 of FIG. 1L, in accordance with some embodiments.FIG. 1L is a cross-sectional view illustrating the bonding pad 180, thenickel layer 230, and the gold layer 240 along a sectional line I-I inFIG. 1L-1, in accordance with some embodiments. As shown in FIG. 1L and1L-1, the bonding pad 180 has an island-like shape, and the nickel layer230 and the gold layer 240 are formed over the bonding pad 180.

FIG. 1L-2 is a top view of the bonding pad 180, the nickel layer 230,and the gold layer 240 of FIG. 1L, in accordance with other embodiments.FIG. 1L is a cross-sectional view illustrating the bonding pad 180, thenickel layer 230, and the gold layer 240 along a sectional line I-I inFIG. 1L-2, in accordance with some embodiments. As shown in FIG. 1L and1L-2, the bonding pad 180 has strip portions 182 spaced apart from eachother, in accordance with some embodiments. The nickel layer 230 and thegold layer 240 are formed over the strip portions 182, in accordancewith some embodiments.

FIG. 1L-3 is a top view of the bonding pad 180, the nickel layer 230,and the gold layer 240 of FIG. 1L, in accordance with still otherembodiments. FIG. 1L is a cross-sectional view illustrating the bondingpad 180, the nickel layer 230, and the gold layer 240 along a sectionalline I-I in FIG. 1L-3, in accordance with some embodiments. As shown inFIG. 1L and 1L-3, the bonding pad 180 has a ring shape, in accordancewith some embodiments. The nickel layer 230 and the gold layer 240 areformed over the bonding pad 180, in accordance with some embodiments.

FIG. 2 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 2, the semiconductordevice structure 100 further includes a palladium layer 290, inaccordance with some embodiments. The palladium layer 290 is formedbetween the nickel layer 230 and the gold layer 240, in accordance withsome embodiments. The palladium layer 290 is formed using an electrolessplating process, in accordance with some embodiments.

In some embodiments, palladium has physical properties similar to thatof gold and is cheaper than gold. Therefore, the formation of thepalladium layer 290 reduces the amount of gold used to form the goldlayer 230, in accordance with some embodiments. As a result, theformation of the palladium layer 290 reduces the manufacturing cost ofthe semiconductor device structure 100, in accordance with someembodiments.

FIG. 3 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 3, the semiconductordevice structure 100 further includes a conductive wire 310 connectingthe gold layer 240 to a bonding pad 320, in accordance with someembodiments. The conductive wire 310 includes gold, aluminum, or anothersuitable conductive material. In some embodiments, the bonding pad 320is positioned over a substrate 330. The bonding pad 320 includes aconductive material, such as copper or aluminum, in accordance with someembodiments.

The substrate 330 includes a semiconductor material, a plastic material,a metal material, a glass material, a ceramic material, or anothersuitable material. In some embodiments, an adhesive layer 340 is formedbetween the semiconductor substrate 250 and the substrate 330. Theadhesive layer 340 includes a polymer material, in accordance with someembodiments. In some other embodiments, the semiconductor substrate 250is not over the substrate 330.

FIG. 4 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 4, the semiconductordevice structure 100 further includes a conductive bump 410 over thegold layer 240, in accordance with some embodiments. The conductive bump410 is electrically connected to the gold layer 240, in accordance withsome embodiments. The conductive bump 410 includes a conductivematerial, in accordance with some embodiments. The conductive bump 410includes a solder material, such as tin (Sn) and copper (Cu), inaccordance with some embodiments.

In some embodiments, the semiconductor device structure 100 does nothave a bonding pad 180, and the detailed description is exemplarilyillustrated as follows.

FIGS. 5A-5B are cross-sectional views of various stages of a process forforming a semiconductor device structure, in accordance with someembodiments. After the step of FIG. 1B, as shown in FIG. 5A, portions ofthe dielectric layer 150 and the semiconductor substrate 110 areremoved, in accordance with some embodiments. After the removal process,an opening 152 and a recess 116 are formed, in accordance with someembodiments.

The opening 152 passes through the dielectric layer 150, in accordancewith some embodiments. The recess 116 is formed in the semiconductorsubstrate 110 and recessed from the surface 112, in accordance with someembodiments. The recess 116 passes through the semiconductor substrate110, in accordance with some embodiments. The recess 116 exposes aportion of the insulating layer 10, in accordance with some embodiments.In some embodiments, the removal process includes a photolithographyprocess and an etching process.

As shown in FIG. 5A, an insulating layer 160 is formed in the opening152 and the recess 116, in accordance with some embodiments. Theinsulating layer 160 is in direct contact with the insulating layer 10,in accordance with some embodiments. The insulating layer 160 includesoxide, such as silicon oxide, in accordance with some embodiments.

As shown in FIG. 5A, the steps of FIGS. 1H-1I are performed to form anopaque layer 210 and recesses 156, in accordance with some embodiments.The opaque layer 210 is formed over the top surface 154 of thedielectric layer 150, in accordance with some embodiments.

The opaque layer 210 has light-blocking portions 212 and grid portions214, in accordance with some embodiments. As shown in FIG. 5A, recesses156 are formed in the dielectric layer 150 and between the grid portions214 or between the grid portion 214 and the light-blocking portion 212,in accordance with some embodiments.

As shown in FIG. 5B, portions of the insulating layers 160 and 10 andthe dielectric layer 120 are removed, in accordance with someembodiments. After the removal process, a through hole H and an opening122 are formed, in accordance with some embodiments. The through hole Hpasses through the insulating layers 160 and 10, in accordance with someembodiments.

The opening 122 is in the dielectric layer 120 and under the recess 116,in accordance with some embodiments. The opening 122 is connected to thethrough hole H, in accordance with some embodiments. The opening 122 andthe through hole H together expose a portion of the wiring layer 132, inaccordance with some embodiments. The removal process includes aphotolithography process and an etching process.

As shown in FIG. 5B, a nickel layer 230 is formed in the through hole Hand the opening 122, in accordance with some embodiments. The opening122 is filled with the nickel layer 230, in accordance with someembodiments. The through hole H is partially filled with the nickellayer 230, in accordance with some embodiments. In some otherembodiments, the through hole H is filled with the nickel layer 230, inaccordance with some embodiments.

The nickel layer 230 is electrically connected to the wiring layer 132,in accordance with some embodiments. The nickel layer 230 is in directcontact with the wiring layer 132, in accordance with some embodiments.The nickel layer 230 is in direct contact with the insulating layers 160and 10 and the dielectric layer 120, in accordance with someembodiments.

The nickel layer 230 is formed using an electroless plating process, inaccordance with some embodiments. The nickel layer 230 contains nickelas a major component, in accordance with some embodiments. The nickellayer 230 contains at least 60 wt % of nickel, in accordance with someembodiments. The nickel layer 230 contains at least 80 wt % of nickel,in accordance with some embodiments.

As shown in FIG. 5B, a gold layer 240 is formed over the nickel layer230, in accordance with some embodiments. The gold layer 240 containsgold as a major component, in accordance with some embodiments. The goldlayer 240 contains at least 60 wt % of gold, in accordance with someembodiments.

The gold layer 240 contains at least 80 wt % of gold, in accordance withsome embodiments. The gold layer 240 is formed using an immersionplating process, in accordance with some embodiments. The gold layer 240and the nickel layer 230 do not extend onto the surface 112, inaccordance with some embodiments. In this step, the semiconductor devicestructure 500 is substantially formed, in accordance with someembodiments.

FIG. 6 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 6, the semiconductordevice structure 500 further includes a palladium layer 290, inaccordance with some embodiments. The palladium layer 290 is formedbetween the nickel layer 230 and the gold layer 240, in accordance withsome embodiments. The palladium layer 290 is in direct contact with theinsulating layer 160, in accordance with some embodiments. The palladiumlayer 290 is formed using an electroless plating process, in accordancewith some embodiments.

FIG. 7 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 7, the semiconductordevice structure 500 further includes a conductive wire 310 connectingthe gold layer 240 to a bonding pad 320, in accordance with someembodiments. The conductive wire 310 is in direct contact with the goldlayer 240 and the bonding pad 320, in accordance with some embodiments.In some embodiments, the bonding pad 320 is positioned over a substrate330. The bonding pad 320 includes a conductive material, such as copperor aluminum, in accordance with some embodiments.

The substrate 330 includes a semiconductor material, a plastic material,a metal material, a glass material, a ceramic material, or anothersuitable material. In some embodiments, an adhesive layer 340 is formedbetween the semiconductor substrate 250 and the substrate 330. Theadhesive layer 340 includes a polymer material, in accordance with someembodiments. In some other embodiments, the semiconductor substrate 250is not over the substrate 330.

FIG. 8 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 8, the semiconductordevice structure 100 further includes a conductive bump 410 over thegold layer 240, in accordance with some embodiments. The conductive bump410 is electrically connected to the gold layer 240, in accordance withsome embodiments.

The conductive bump 410 is in direct contact with the gold layer 240, inaccordance with some embodiments. The conductive bump 410 includes aconductive material, in accordance with some embodiments. The conductivebump 410 includes a solder material, such as tin (Sn) and copper (Cu),in accordance with some embodiments.

FIG. 9 is a cross-sectional view of a semiconductor device structure, inaccordance with some embodiments. As shown in FIG. 9, a semiconductordevice structure 900 is similar to the semiconductor device structure100 of FIG. 1L, except that the semiconductor device structure 900further includes a dielectric layer 910, a passivation layer 920, adielectric layer 930, a passivation layer 940, an insulating layer 950,and a conductive via structure 960, in accordance with some embodiments.

The dielectric layer 910 is formed over the dielectric layer 120 and thewiring layer 136, in accordance with some embodiments. The dielectriclayers 910 and 120 have the same material, in accordance with someembodiments. The passivation layer 920 is formed over the dielectriclayers 910, in accordance with some embodiments. The passivation layer920 includes oxide (e.g., silicon oxide) or nitride, in accordance withsome embodiments.

The wiring substrate S further includes the dielectric layer 930 and thepassivation layer 940, in accordance with some embodiments. Thedielectric layer 930 is formed over the wiring layer 278 and thedielectric layer 260, in accordance with some embodiments.

The dielectric layers 930 and 260 have the same material, in accordancewith some embodiments. The passivation layer 940 is formed over thedielectric layer 930, in accordance with some embodiments. Thepassivation layer 940 includes oxide (e.g., silicon oxide) or nitride,in accordance with some embodiments. The passivation layers 920 and 940are bonded with each other, in accordance with some embodiments.

As shown in FIG. 9, a through hole H1 passes through the dielectriclayer 150, the semiconductor substrate 110, and the insulating layer 10,in accordance with some embodiments. The through hole H1 exposes aportion of the dielectric layer 120, in accordance with someembodiments. As shown in FIG. 9, the insulating layer 950 is formed overthe inner wall W1 of the through hole H1, in accordance with someembodiments. The insulating layer 950 includes oxide, such as siliconoxide, in accordance with some embodiments.

As shown in FIG. 9, a through hole H2 passes through the dielectriclayer 120, in accordance with some embodiments. As shown in FIG. 9, thewiring layer 136 has an opening 136 a between the through hole H1 andthe wiring layer 278, in accordance with some embodiments.

As shown in FIG. 9, a through hole H3 passes through the dielectriclayer 910, the passivation layer 920, the dielectric layer 930, and thepassivation layer 940, in accordance with some embodiments. The throughholes H1, H2, and H3 and the opening 136 a together expose a portion ofthe wiring layer 278, in accordance with some embodiments. The throughholes H1, H2, and H3 and the opening 136 a communicate (or areconnected) with each other, in accordance with some embodiments.

The conductive via structure 960 is formed in the through holes H1, H2,and H3 and the opening 136 a, in accordance with some embodiments. Thethrough holes H1, H2, and H3 and the opening 136 a are filled with theconductive via structure 960, in accordance with some embodiments. Theconductive via structure 960 passes through the dielectric layer 150,the semiconductor substrate 110, the insulating layer 10, the dielectriclayer 120, the dielectric layer 910, the passivation layer 920, thepassivation layer 940, and the dielectric layer 930 sequentially, inaccordance with some embodiments.

The conductive via structure 960 electrically connects the wiring layer136 to the wiring layer 278, in accordance with some embodiments. Theconductive via structure 960 includes a conductive material, inaccordance with some embodiments. The conductive material includestungsten, aluminum, copper, or another suitable conductive material.

FIG. 10 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 10, thesemiconductor device structure 900 further includes a palladium layer290, in accordance with some embodiments. The palladium layer 290 isformed between the nickel layer 230 and the gold layer 240, inaccordance with some embodiments. The palladium layer 290 is formedusing an electroless plating process, in accordance with someembodiments.

FIG. 11 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 11, thesemiconductor device structure 900 further includes a conductive wire310 connecting the gold layer 240 to a bonding pad 320, in accordancewith some embodiments. In some embodiments, the bonding pad 320 ispositioned over a substrate 330. The bonding pad 320 includes aconductive material, such as copper or aluminum, in accordance with someembodiments.

The substrate 330 includes a semiconductor material, a plastic material,a metal material, a glass material, a ceramic material, or anothersuitable material. In some embodiments, an adhesive layer 340 is formedbetween the semiconductor substrate 250 and the substrate 330. Theadhesive layer 340 includes a polymer material, in accordance with someembodiments. In some other embodiments, the semiconductor substrate 250is not over the substrate 330.

FIG. 12 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 12, thesemiconductor device structure 900 further includes a conductive bump410 over the gold layer 240, in accordance with some embodiments. Theconductive bump 410 is electrically connected to the gold layer 240, inaccordance with some embodiments.

The conductive bump 410 is in direct contact with the gold layer 240, inaccordance with some embodiments. The conductive bump 410 includes aconductive material, in accordance with some embodiments. The conductivebump 410 includes a solder material, such as tin (Sn) and copper (Cu),in accordance with some embodiments.

FIG. 13 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 13, asemiconductor device structure 1300 is similar to the semiconductordevice structure 500 of FIG. 5B, except that the semiconductor devicestructure 1300 further includes a dielectric layer 910, a passivationlayer 920, a dielectric layer 930, a passivation layer 940, aninsulating layer 950, and a conductive via structure 960, in accordancewith some embodiments.

The dielectric layer 910 is formed over the dielectric layer 120 and thewiring layer 136, in accordance with some embodiments. The dielectriclayers 910 and 120 have the same material, in accordance with someembodiments. The passivation layer 920 is formed over the dielectriclayers 910, in accordance with some embodiments. The passivation layer920 includes oxide (e.g., silicon oxide) or nitride, in accordance withsome embodiments.

As shown in FIG. 13, the wiring substrate S further includes thedielectric layer 930 and the passivation layer 940, in accordance withsome embodiments. The dielectric layer 930 is formed over the wiringlayer 278 and the dielectric layer 260, in accordance with someembodiments.

The dielectric layers 930 and 260 have the same material, in accordancewith some embodiments. The passivation layer 940 is formed over thedielectric layer 930, in accordance with some embodiments. Thepassivation layer 940 includes oxide (e.g., silicon oxide) or nitride,in accordance with some embodiments. The passivation layers 920 and 940are bonded with each other, in accordance with some embodiments.

As shown in FIG. 13, a through hole H1 passes through the dielectriclayer 150, the semiconductor substrate 110, and the insulating layer 10,in accordance with some embodiments. The through hole H1 exposes aportion of the dielectric layer 120, in accordance with someembodiments. As shown in FIG. 13, the insulating layer 950 is formedover the inner wall W1 of the through hole H1, in accordance with someembodiments. The insulating layer 950 includes oxide, such as siliconoxide, in accordance with some embodiments.

As shown in FIG. 13, a through hole H2 passes through the dielectriclayer 120, in accordance with some embodiments. As shown in FIG. 13, thewiring layer 136 has an opening 136 a between the through hole H1 andthe wiring layer 278, in accordance with some embodiments.

As shown in FIG. 13, a through hole H3 passes through the dielectriclayer 910, the passivation layer 920, the dielectric layer 930, and thepassivation layer 940, in accordance with some embodiments. The throughholes H1, H2, and H3 and the opening 136 a together expose a portion ofthe wiring layer 278, in accordance with some embodiments. The throughholes H1, H2, and H3 and the opening 136 a communicate (or areconnected) with each other, in accordance with some embodiments.

The conductive via structure 960 is formed in the through holes H1, H2,and H3 and the opening 136 a, in accordance with some embodiments. Thethrough holes H1, H2, and H3 and the opening 136 a are filled with theconductive via structure 960, in accordance with some embodiments.

The conductive via structure 960 passes through the dielectric layer150, the semiconductor substrate 110, the insulating layer 10, thedielectric layer 120, the dielectric layer 910, the passivation layer920, the passivation layer 940, and the dielectric layer 930sequentially, in accordance with some embodiments.

The conductive via structure 960 electrically connects the wiring layer136 to the wiring layer 278, in accordance with some embodiments. Theconductive via structure 960 includes a conductive material, inaccordance with some embodiments. The conductive material includestungsten, aluminum, copper, or another suitable conductive material.

FIG. 14 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 14, thesemiconductor device structure 1300 further includes a palladium layer290, in accordance with some embodiments. The palladium layer 290 isformed between the nickel layer 230 and the gold layer 240, inaccordance with some embodiments. The palladium layer 290 is formedusing an electroless plating process, in accordance with someembodiments.

FIG. 15 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 15, thesemiconductor device structure 1300 further includes a conductive wire310 connecting the gold layer 240 to a bonding pad 320, in accordancewith some embodiments. In some embodiments, the bonding pad 320 ispositioned over a substrate 330. The bonding pad 320 includes aconductive material, such as copper or aluminum, in accordance with someembodiments.

The substrate 330 includes a semiconductor material, a plastic material,a metal material, a glass material, a ceramic material, or anothersuitable material. In some embodiments, an adhesive layer 340 is formedbetween the semiconductor substrate 250 and the substrate 330. Theadhesive layer 340 includes a polymer material, in accordance with someembodiments. In some other embodiments, the semiconductor substrate 250is not over the substrate 330.

FIG. 16 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 16, thesemiconductor device structure 1300 further includes a conductive bump410 over the gold layer 240, in accordance with some embodiments. Theconductive bump 410 is electrically connected to the gold layer 240, inaccordance with some embodiments. The conductive bump 410 includes aconductive material, in accordance with some embodiments. The conductivebump 410 includes a solder material, such as tin (Sn) and copper (Cu),in accordance with some embodiments.

FIG. 17 is a cross-sectional view of a semiconductor device structure1700, in accordance with some embodiments. As shown in FIG. 17, thesemiconductor device structure 1700 is similar to the semiconductordevice structure 1300 of FIG. 16, except that the semiconductor devicestructure 1700 further has a thick wiring layer 1710 under the nickellayer 230, in accordance with some embodiments.

The nickel layer 230 is in direct contact with the thick wiring layer1710, in accordance with some embodiments. The nickel layer 230 iselectrically connected to the thick wiring layer 1710, in accordancewith some embodiments. The thick wiring layer 1710 is adjacent to thewiring layers 132 and 134 and the conductive via structure 142, inaccordance with some embodiments.

The thick wiring layer 1710 has a thickness T1, in accordance with someembodiments. The wiring layer 132 has a thickness T2, in accordance withsome embodiments. The conductive via structure 142 has a thickness T3,in accordance with some embodiments. The wiring layer 134 has athickness T4, in accordance with some embodiments. The thickness T1 isgreater than the thicknesses T2, T3, or T4, in accordance with someembodiments. The thickness T1 is greater than or equal to the sum of thethicknesses T2, T3, and T4, in accordance with some embodiments. Thethrough hole H may extend into the thick wiring layer 1710 due to overetching. Since the thick wiring layer 1710 has a large thickness T1, thethrough hole H is prevented from passing through the thick wiring layer1710. Therefore, the formation of the thick wiring layer 1710 improvesthe yield of the semiconductor device structure 1700.

FIG. 18A is a cross-sectional view of a semiconductor device structure1800, in accordance with some embodiments. FIG. 18B is a top view of anickel layer 230, a conductive ring structure R1, and a portion of thewiring layer 132 of the semiconductor device structure 1800, inaccordance with some embodiments.

As shown in FIGS. 18A and 18B, the semiconductor device structure 1800is similar to the semiconductor device structure 1300 of FIG. 16, exceptthat the semiconductor device structure 1800 further has conductive ringstructures R1, R2, and R3, in accordance with some embodiments.

The conductive ring structure R1 is formed in the dielectric layer 120and over the wiring layer 132, in accordance with some embodiments. Theconductive ring structure R1 is connected with the wiring layer 132, inaccordance with some embodiments. The conductive ring structure R2 isformed in the dielectric layer 120 and between the wiring layers 132 and134, in accordance with some embodiments.

The conductive ring structure R2 is connected with the wiring layers 132and 134, in accordance with some embodiments. The conductive ringstructure R3 is formed in the dielectric layer 120 and between thewiring layers 134 and 136, in accordance with some embodiments. Theconductive ring structure R3 is connected with the wiring layers 134 and136, in accordance with some embodiments. The conductive ring structuresR1, R2, and R3 and the wiring layers 132 and 134 are made of the samematerial, in accordance with some embodiments.

The conductive ring structures R1, R2, and R3 and the wiring layers 132and 134 have openings P1, P2, P3, 132 a, and 134 a respectively, inaccordance with some embodiments. The openings P1, P2, P3, 132 a, and134 a are connected with each other, in accordance with someembodiments. The nickel layer 230 further extends into the openings P1,P2, P3, 132 a, and 134 a, in accordance with some embodiments. Theconductive ring structures R1, R2, and R3 and the wiring layers 132 and134 surround the nickel layer 230, in accordance with some embodiments.

The conductive ring structures R1, R2, and R3 and the wiring layers 132and 134 together prevent the electroplating solution (for forming thenickel layer 230) from diffusing into the dielectric layer 120, inaccordance with some embodiments. Therefore, the yield of thesemiconductor device structure 1800 is improved, in accordance with someembodiments.

FIG. 19 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 19, thesemiconductor device structure 1900 is similar to the semiconductordevice structure 1700 of FIG. 17, except that the semiconductor devicestructure 1900 further includes a conductive wire 310 connecting thegold layer 240 to a bonding pad 320, and the semiconductor devicestructure 1900 does not have the conductive bump 410, in accordance withsome embodiments.

In some embodiments, the bonding pad 320 is positioned over a substrate330. The bonding pad 320 includes a conductive material, such as copperor aluminum, in accordance with some embodiments. The substrate 330includes a semiconductor material, a plastic material, a metal material,a glass material, a ceramic material, or another suitable material.

In some embodiments, an adhesive layer 340 is formed between thesemiconductor substrate 250 and the substrate 330. The adhesive layer340 includes a polymer material, in accordance with some embodiments. Insome other embodiments, the semiconductor substrate 250 is not over thesubstrate 330.

FIG. 20 is a cross-sectional view of a semiconductor device structure,in accordance with some embodiments. As shown in FIG. 20, thesemiconductor device structure 2000 is similar to the semiconductordevice structure 1800 of FIG. 18A, except that the semiconductor devicestructure 2000 further includes a conductive wire 310 connecting thegold layer 240 to a bonding pad 320, and the semiconductor devicestructure 2000 does not have the conductive bump 410, in accordance withsome embodiments.

In some embodiments, the bonding pad 320 is positioned over a substrate330. The bonding pad 320 includes a conductive material, such as copperor aluminum, in accordance with some embodiments. The substrate 330includes a semiconductor material, a plastic material, a metal material,a glass material, a ceramic material, or another suitable material.

In some embodiments, an adhesive layer 340 is formed between thesemiconductor substrate 250 and the substrate 330. The adhesive layer340 includes a polymer material, in accordance with some embodiments. Insome other embodiments, the semiconductor substrate 250 is not over thesubstrate 330.

In accordance with some embodiments, semiconductor device structures andmethods for forming the same are provided. The methods (for forming thesemiconductor device structure) form a nickel layer over a bonding padto prevent the bonding pad from peeling off. The methods form a goldlayer over the nickel layer to buffer the bonding stress generated by awire bonding process or a ball bonding process. Therefore, the formationof the nickel layer and the gold layer improves the reliability of thesemiconductor device structure.

In accordance with some embodiments, a semiconductor device structure isprovided. The semiconductor device structure includes a firstsemiconductor substrate having a first surface, a second surface, and arecess. The second surface is opposite to the first surface. The recesspasses through the first semiconductor substrate. The semiconductordevice structure includes a first wiring layer over the second surface.The semiconductor device structure includes a first bonding pad in therecess and extending to the first wiring layer so as to be electricallyconnected to the first wiring layer. The semiconductor device structureincludes a nickel layer over the first bonding pad. The semiconductordevice structure includes a gold layer over the nickel layer.

In accordance with some embodiments, a semiconductor device structure isprovided. The semiconductor device structure includes a firstsemiconductor substrate having a surface and a recess. The recess passesthrough the first semiconductor substrate. The semiconductor devicestructure includes a first wiring layer over the surface. Thesemiconductor device structure includes a nickel layer in the recess andextending to the first wiring layer so as to be electrically connectedto the first wiring layer. The semiconductor device structure includes agold layer over the nickel layer.

In accordance with some embodiments, a method for forming asemiconductor device structure is provided. The method includesproviding a first semiconductor substrate having a surface. The methodincludes forming a first wiring layer over the surface. The methodincludes forming a recess in the first semiconductor substrate. Therecess passes through the first semiconductor substrate to expose thefirst wiring layer. The method includes forming a first bonding pad inthe recess. The first bonding pad extends to the first wiring layer soas to be electrically connected to the first wiring layer. The methodincludes forming a nickel layer over the first bonding pad. The methodincludes forming a gold layer over the nickel layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A semiconductor device structure, comprising: asemiconductor substrate having a first surface, a second surface, andsidewalls defining a recess that passes through the semiconductorsubstrate; an interconnect structure comprising one or more interconnectlayers within a first dielectric structure that is disposed along thesecond surface; and a conductive bonding structure disposed within therecess and comprising nickel, wherein the conductive bonding structurehas opposing outermost sidewalls that contact sidewalls of theinterconnect structure.
 2. The semiconductor device structure of claim1, wherein the interconnect structure comprises an interconnect via andan interconnect wire; and wherein sidewalls of the interconnect via andthe interconnect wire both contact the opposing outermost sidewalls ofthe conductive bonding structure.
 3. The semiconductor device structureof claim 1, wherein the interconnect structure continually extendsaround a perimeter of the conductive bonding structure.
 4. Thesemiconductor device structure of claim 1, wherein the interconnectstructure forms a continuous ring around the conductive bondingstructure.
 5. The semiconductor device structure of claim 1, wherein theinterconnect structure laterally extends past the opposing outermostsidewalls of the conductive bonding structure and vertically overlapsthe conductive bonding structure.
 6. The semiconductor device structureof claim 1, wherein the conductive bonding structure further comprisesgold.
 7. The semiconductor device structure of claim 1, wherein theconductive bonding structure comprises a nickel layer contacting thesidewalls of the interconnect structure and a gold layer over the nickellayer.
 8. The semiconductor device structure of claim 7, furthercomprising: an insulating layer lining the sidewalls of thesemiconductor substrate defining the recess, wherein the gold layer hassidewalls contacting sidewalls of the insulating layer.
 9. Asemiconductor device structure, comprising: a semiconductor substratehaving a first surface, a second surface, and sidewalls defining arecess that passes through the semiconductor substrate; a firstinterconnect layer within a first dielectric structure disposed belowthe second surface; and a conductive bonding structure comprising nickeland disposed within the recess, wherein the conductive bonding structurehas a height between a bottommost surface of the conductive bondingstructure and a topmost surface of the conductive bonding structure,wherein the height is substantially constant between opposing outermostsidewalls of the conductive bonding structure.
 10. The semiconductordevice structure of claim 9, wherein the conductive bonding structurehas a width between the opposing outermost sidewalls of the conductivebonding structure; and wherein the width is substantially constantbetween the bottommost surface of the conductive bonding structure andthe topmost surface of the conductive bonding structure.
 11. Thesemiconductor device structure of claim 9, wherein the conductivebonding structure has a substantially rectangular cross-section.
 12. Thesemiconductor device structure of claim 9, further comprising: a bondingpad disposed within the recess and extending to the first interconnectlayer, wherein the conductive bonding structure contacts a top surfaceof the bonding pad.
 13. The semiconductor device structure of claim 12,further comprising: a dielectric filling layer having an uppermostsurface facing away from the semiconductor substrate, wherein theuppermost surface is directly over the bonding pad and is completelyover the first surface of the semiconductor substrate.
 14. Thesemiconductor device structure of claim 9, a dielectric layer disposedalong the first surface and having sidewalls that further define therecess to extend through the dielectric layer.
 15. The semiconductordevice structure of claim 14, wherein the conductive bonding structureis completely confined within the recess.
 16. The semiconductor devicestructure of claim 14, further comprising: an opaque layer disposed overa top surface of the dielectric layer, wherein the dielectric layercontinuously extends from a first one of the sidewalls to additionalsidewalls that define a plurality of recesses disposed laterally betweenan overlying grid portions of an opaque material.
 17. The semiconductordevice structure of claim 14, wherein a first one of the sidewalls ofthe dielectric layer and a first one of the sidewalls of thesemiconductor substrate are aligned along a line.
 18. A semiconductordevice structure, comprising: a semiconductor substrate having a firstsurface, a second surface opposing the first surface, and sidewallsdefining a recess that passes through the semiconductor substrate; afirst interconnect layer within a first dielectric structure disposedbelow the second surface; a bonding pad in the recess and extending tothe first interconnect layer; a dielectric filling layer within therecess, wherein the dielectric filling layer has sidewalls defining anopening over a portion of the bonding pad and further has an uppermostsurface facing away from the semiconductor substrate, wherein theuppermost surface is directly over the bonding pad and is completelyover the first surface of the semiconductor substrate; and a conductivebonding structure comprising nickel and disposed within the opening overthe bonding pad.
 19. The semiconductor device structure of claim 18,wherein the dielectric filling layer has an outermost sidewall thatvertically extends from over the first surface of the semiconductorsubstrate to between the first surface and the second surface of thesemiconductor substrate.
 20. The semiconductor device structure of claim18, wherein a horizontal plane extending along the first surface of thesemiconductor substrate intersects opposing outermost sidewalls of thedielectric filling layer and opposing outermost sidewalls of theconductive bonding structure.